Institute of Electrical Engineering, Faculty of Electrical Engineering and Information Technology, Slovak University of Technology
Hart'anský R., Hricko J., Mierka M., Halgoš J., Dzuriš M.
MEMS Sensor of Force
2020, Vol. 16, no. 1, pp. 85-92
The paper is focused on the design of a compact compliant mechanical body (CCMB) that will be used as a transducer of the one-axis force to the distance of two plates. The conversion principle of the distance (which carries information about the acting force) to the frequency of the electrical signal is carefully described in the article too.