The paper is focused on the design of a compact compliant mechanical body (CCMB) that
will be used as a transducer of the one-axis force to the distance of two plates. The conversion
principle of the distance (which carries information about the acting force) to the frequency of
the electrical signal is carefully described in the article too.
Keywords:
compact compliant mechanical body, mechanical force sensor, transfer response
Citation:
Hart'anský R., Hricko J., Mierka M., Halgoš J., Dzuriš M., MEMS Sensor of Force, Rus. J. Nonlin. Dyn.,
2020, Vol. 16, no. 1,
pp. 85-92
DOI:10.20537/nd200107